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Extreme Ultraviolet Lithography

by Harry J. Levinson
language: english
Publisher: SPIE PRESS, December of 2020 ‧
70,30€
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Covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Each topic is approached from the perspective of a practicing lithographer.

Extreme Ultraviolet Lithography

by Harry J. Levinson

Property Description
ISBN: 9781510639393
Publisher: SPIE PRESS
Release Date: December of 2020
Language: English
Dimensions: 252 x 176 x 16 mm
Cover: Softcover
Pages: 245
Format: Book
Collection: Press Monographs
Categories: Books in English > Engineering > Electricity and Energy
Books in English > Others
EAN: 9781510639393