adicionar à lista de desejos
Lithography Process Control
language: english
Publisher:
SPIE PRESS, February of 1999 ‧
see product details
SYNOPSIS
This text is intended to be a self-contained tutorial on lithography process control. It works as an introduction to those entering the field, and as a reference for the experienced lithography engineer. Topics covered include linewidth control, overlay, and yield.
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9780819430526 |
| Publisher: | SPIE PRESS |
| Release Date: | February of 1999 |
| Language: | English |
| Dimensions: | 179 x 230 x 15 mm |
| Cover: | Softcover |
| Pages: | 194 |
| Format: | Book |
| Collection: | Spie Press |
| Categories: |
Books in English
>
Art
>
Photography
|
| EAN: | 9780819430526 |
BOOKS FROM THE SAME COLLECTION
-
Integral Transforms For Engineers30%SPIE PRESS48,27€
68,95€free shipping -
Subwavelength Diffractive Optics, Sel PapersSPIE PRESS106,35€free shipping
-
Extreme Ultraviolet Lithography30%SPIE PRESS54,89€
78,41€free shipping -
Principles Of Lithography30%SPIE PRESS74,76€
106,80€free shipping