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Principles Of Lithography

by Harry J. Levinson
language: english
Publisher: SPIE PRESS, July of 2019 ‧
106,80€
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This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.

Principles Of Lithography

by Harry J. Levinson

Property Description
ISBN: 9781510627604
Publisher: SPIE PRESS
Release Date: July of 2019
Language: English
Dimensions: 184 x 260 x 29 mm
Cover: Hardcover
Pages: 630
Format: Book
Collection: Press Monographs
Categories: Books in English > Engineering > Electricity and Energy
Books in English > Others
EAN: 9781510627604

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