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Hf-Based High-K Dielectrics
Process Development, Performance Characterization, And Reliability
Book
eBook
language: english
Publisher:
Springer International Publishing AG, December of 2007 ‧
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33,79€
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SYNOPSIS
Hard breakdown and soft breakdown, particularly the Weibull slopes, were studied under constant voltage stress. The origin of soft breakdown (first breakdown) was studied and the results suggested that the soft breakdown may be due to one layer breakdown in the bilayer structure (HfO2/SiO2: 4 nm/4 nm).
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9783031014246 |
| Publisher: | Springer International Publishing AG |
| Release Date: | December of 2007 |
| Language: | English |
| Dimensions: | 191 x 235 x 20 mm |
| Cover: | Softcover |
| Pages: | 92 |
| Format: | Book |
| Collection: | Synthesis Lectures On Solid State Materials And Devices |
| Categories: |
Books in English
>
Engineering
>
Mechanical Engineering
|
| EAN: | 9783031014246 |
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