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Hf-Based High-K Dielectrics eBook

Process Development, Performance Characterization, And Reliability

by Young-Hee Kim e Jack C. Lee
Book eBook
language: english
Publisher: Springer International Publishing, June of 2022 ‧
33,11€
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Ebook for ADE
Hard breakdown and soft breakdown, particularly the Weibull slopes, were studied under constant voltage stress. The origin of soft breakdown (first breakdown) was studied and the results suggested that the soft breakdown may be due to one layer breakdown in the bilayer structure (HfO2/SiO2: 4 nm/4 nm).

Hf-Based High-K Dielectrics

Process Development, Performance Characterization, And Reliability

by Young-Hee Kim e Jack C. Lee

Property Description
ISBN: 9783031025525
Publisher: Springer International Publishing
Release Date: June of 2022
Language: English
Pages: 92
Format: eBook
File Format and Compatibility: PDF para ADE
Collection: Synthesis Lectures On Solid State Materials And Devices
Categories: eBooks in English > Engineering > General Engineering
eBooks in English > Engineering > Electricity and Energy
EAN: 9783031025525

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