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Optical Lithography For Advanced Semiconductor Patterning
idioma: inglês
Editor:
SPIE PRESS, maio de 2025 ‧
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142,35€
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SINOPSE
Optical lithography drives modern microchip fabrication through advanced high-NA extreme-ultraviolet techniques that shape image quality inside resist layers. The text gradually unfolds the complexities of image formation with mathematics, examples, and dedicated case studies for scientifically inclined readers.
DETALHES
| Propriedade | Descrição |
|---|---|
| ISBN: | 9781510680333 |
| Editor: | SPIE PRESS |
| Data de Lançamento: | maio de 2025 |
| Idioma: | Inglês |
| Encadernação: | Capa dura |
| Páginas: | 1156 |
| Tipo de produto: | Livro |
| Coleção: | Press Monographs |
| Classificação Temática: |
Livros em Inglês
>
Ciências Exatas e Naturais
>
Física
|
| EAN: | 9781510680333 |
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