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Optical And Euv Lithography

A Modeling Perspective

by Andreas Erdmann
language: english
Publisher: SPIE PRESS, April of 2021 ‧
86,52€
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Introduces interested students with backgrounds in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology, and other areas to the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers expand their knowledge of alternative methods and applications.

Optical And Euv Lithography

A Modeling Perspective

by Andreas Erdmann

Property Description
ISBN: 9781510639010
Publisher: SPIE PRESS
Release Date: April of 2021
Language: English
Dimensions: 255 x 178 x 24 mm
Cover: Softcover
Pages: 374
Format: Book
Collection: Press Monographs
Categories: Books in English > Engineering > General Engineering
Books in English > Others
EAN: 9781510639010