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Handbook Of Microlithography, Micromachining, And Microfabrication
language: english
Publisher:
SPIE PRESS, December of 1997 ‧
see product details
SYNOPSIS
This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9780819423795 |
| Publisher: | SPIE PRESS |
| Release Date: | December of 1997 |
| Language: | English |
| Dimensions: | 190 x 267 x 42 mm |
| Cover: | Hardcover |
| Pages: | 698 |
| Format: | Book |
| Collection: | Spie Press Monograph |
| Categories: |
Books in English
>
Engineering
>
Electricity and Energy
Books in English > Others |
| EAN: | 9780819423795 |
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