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Handbook Of Microlithography, Micromachining, And Microfabrication
Microlithography
language: english
Publisher:
SPIE PRESS, March of 1997 ‧
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SYNOPSIS
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. This volume contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9780819497864 |
| Publisher: | SPIE PRESS |
| Release Date: | March of 1997 |
| Language: | English |
| Dimensions: | 152 x 229 x 20 mm |
| Cover: | Softcover |
| Pages: | 776 |
| Format: | Book |
| Collection: | Press Monograph |
| Categories: |
Books in English
>
Engineering
>
General Engineering
Books in English > Others |
| EAN: | 9780819497864 |
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