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Euv Lithography

by Vivek Bakshi
language: english
Publisher: JOHN WILEY & SONS INC, January of 2009 ‧
154,05€
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EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

Euv Lithography

by Vivek Bakshi

Property Description
ISBN: 9780470471555
Publisher: JOHN WILEY & SONS INC
Release Date: January of 2009
Language: English
Cover: Hardcover
Pages: 702
Format: Book
Categories: Books in English > Engineering > Mechanical Engineering
Books in English > Others
EAN: 9780470471555