adicionar à lista de desejos
Research On Chemical Mechanical Polishing Mechanism Of Novel Diffusion Barrier Ru For Cu Interconnect eBook
language: english
Publisher:
Springer Nature Singapore, September of 2017 ‧
see product details
118,59€
10% OFF
CARD
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
IMMEDIATE AVAILABILITY
Ebook for ADE
SYNOPSIS
This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material.
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9789811061653 |
| Publisher: | Springer Nature Singapore |
| Release Date: | September of 2017 |
| Language: | English |
| Format: | eBook |
| File Format and Compatibility: | |
| Collection: | Springer Theses |
| Categories: |
eBooks in English
>
Engineering
>
General Engineering
|
| EAN: | 9789811061653 |
| Acessibilidade: | Ver características de acessibilidade indicadas pelo editor |
BOOKS FROM THE SAME COLLECTION
-
Pre-order10%Non-Empirical Description Of Nuclear Collective Motion With Optimized Basis For Generator Coordinate MethodSPRINGER VERLAG, SINGAPORE133,83€
148,70€free shipping -
Pre-order10%Detailed Structure And Evolution Modeling Of The Tightest Massive Binary StarsSpringer Nature Switzerland AG182,49€
202,77€free shipping
-
10%Research On Chemical Mechanical Polishing Mechanism Of Novel Diffusion Barrier Ru For Cu InterconnectSPRINGER VERLAG, SINGAPORE121,66€ 10% CARDfree shipping