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Research On Chemical Mechanical Polishing Mechanism Of Novel Diffusion Barrier Ru For Cu Interconnect
language: english
Publisher:
SPRINGER VERLAG, SINGAPORE, January of 2019 ‧
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SYNOPSIS
This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material.
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9789811355851 |
| Publisher: | SPRINGER VERLAG, SINGAPORE |
| Release Date: | January of 2019 |
| Language: | English |
| Dimensions: | 155 x 235 x 20 mm |
| Cover: | Softcover |
| Pages: | 137 |
| Format: | Book |
| Collection: | Springer Theses |
| Categories: |
Books in English
>
Engineering
>
General Engineering
Books in English > Engineering > Mechanical Engineering |
| EAN: | 9789811355851 |
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