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Design For Manufacturability With Advanced Lithography eBook
language: english
Publisher:
Springer International Publishing, October of 2015 ‧
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SYNOPSIS
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9783319203850 |
| Publisher: | Springer International Publishing |
| Release Date: | October of 2015 |
| Language: | English |
| Format: | eBook |
| File Format and Compatibility: | PDF para ADE |
| Collection: | Engineering |
| Categories: |
eBooks in English
>
Engineering
>
Electricity and Energy
|
| EAN: | 9783319203850 |
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