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Design For Manufacturability With Advanced Lithography eBook

by Bei Yu e David Z. Pan
language: english
Publisher: Springer International Publishing, October of 2015 ‧
59,61€
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This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).

Design For Manufacturability With Advanced Lithography

by Bei Yu e David Z. Pan

Property Description
ISBN: 9783319203850
Publisher: Springer International Publishing
Release Date: October of 2015
Language: English
Format: eBook
Collection: Engineering
Categories: eBooks in English > Engineering > Electricity and Energy
EAN: 9783319203850