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Computational Lithography eBook
language: english
Publisher:
WILEY, January of 2011 ‧
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140,38€
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IMMEDIATE AVAILABILITY
Ebook for ADE
SYNOPSIS
This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based mathematical optimization approaches.
DETeBook com proteção para wookreaderILS
| Property | Description |
|---|---|
| ISBN: | 9781118043578 |
| Publisher: | WILEY |
| Release Date: | January of 2011 |
| Language: | English |
| Format: | eBook |
| Categories: |
eBooks in English
>
Engineering
>
Electricity and Energy
|
| EAN: | 9781118043578 |
| Acessibilidade: | Ver características de acessibilidade indicadas pelo editor |
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