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Computational Lithography eBook
idioma: inglês
Editor:
WILEY, Janeiro de 2011 ‧
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140,38€
10% DESCONTO
CARTÃO
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DISPONIBILIDADE IMEDIATA
Ebook para ADE
SINOPSE
This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based mathematical optimization approaches.
DETALHES
| Propriedade | Descrição |
|---|---|
| ISBN: | 9781118043578 |
| Editor: | WILEY |
| Data de Lançamento: | Janeiro de 2011 |
| Idioma: | Inglês |
| Tipo de produto: | eBook |
| Formato e Compatibilidade: | |
| Classificação Temática: |
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| EAN: | 9781118043578 |
| Acessibilidade: | Ver características de acessibilidade indicadas pelo editor |
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