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Defect Recognition And Image Processing In Semiconductors 1997
Proceedings Of The Seventh Conference On Defect Recognition And Image Processing, Berlin, September 1997
idioma: inglês
Editor:
TAYLOR & FRANCIS LTD, Janeiro de 1998 ‧
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SINOPSE
Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. It investigates defects in layers and devices.
DETALHES
| Propriedade | Descrição |
|---|---|
| ISBN: | 9780750305006 |
| Editor: | TAYLOR & FRANCIS LTD |
| Data de Lançamento: | Janeiro de 1998 |
| Idioma: | Inglês |
| Encadernação: | Capa dura |
| Páginas: | 524 |
| Tipo de produto: | Livro |
| Coleção: | Institute Of Physics Conference Series |
| Classificação Temática: |
Livros em Inglês
>
Ciências Exatas e Naturais
>
Física
|
| EAN: | 9780750305006 |
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