Rapid Thermal Processing

Proceedings Of Symposium I On Rapid Thermal Processing Of The E-Mrs 1998 Spring Conference, Strasbourg, France, June 16-19, 1998

language: english
Publisher: ELSEVIER SCIENCE & TECHNOLOGY, March of 1999 ‧
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Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. This work talks about Rapid Thermal Processing.

Rapid Thermal Processing

Proceedings Of Symposium I On Rapid Thermal Processing Of The E-Mrs 1998 Spring Conference, Strasbourg, France, June 16-19, 1998

Property Description
ISBN: 9780080436128
Publisher: ELSEVIER SCIENCE & TECHNOLOGY
Release Date: March of 1999
Language: English
Cover: Hardcover
Pages: 356
Format: Book
Collection: European Materials Research Society Symposia Proceedings
Categories: Books in English > Engineering > General Engineering
EAN: 9780080436128