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Mems And Moems Technology And Applications
Mems And Moems Technology And Applications
language: english
Publisher:
SPIE PRESS, December of 2000 ‧
see product details
SYNOPSIS
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component).
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9780819495983 |
| Publisher: | SPIE PRESS |
| Release Date: | December of 2000 |
| Language: | English |
| Dimensions: | 152 x 229 x 20 mm |
| Cover: | Softcover |
| Pages: | 528 |
| Format: | Book |
| Collection: | Press Monograph |
| Categories: |
Books in English
>
Engineering
>
General Engineering
|
| EAN: | 9780819495983 |
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