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Handbook For Cleaning For Semiconductor Manufacturing

Fundamentals And Applications

language: english
Publisher: JOHN WILEY & SONS INC, February of 2011 ‧
331,14€
231,80€
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This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

Handbook For Cleaning For Semiconductor Manufacturing

Fundamentals And Applications

Property Description
ISBN: 9780470625958
Publisher: JOHN WILEY & SONS INC
Release Date: February of 2011
Language: English
Dimensions: 184 x 261 x 37 mm
Cover: Hardcover
Pages: 614
Format: Book
Collection: Wiley-Scrivener
Categories: Books in English > Engineering > General Engineering
Books in English > Others
EAN: 9780470625958

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