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Defect Recognition And Image Processing In Semiconductors 1997
Proceedings Of The Seventh Conference On Defect Recognition And Image Processing, Berlin, September 1997
language: english
Publisher:
TAYLOR & FRANCIS LTD, January of 1998 ‧
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SYNOPSIS
Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. It investigates defects in layers and devices.
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9780750305006 |
| Publisher: | TAYLOR & FRANCIS LTD |
| Release Date: | January of 1998 |
| Language: | English |
| Cover: | Hardcover |
| Pages: | 524 |
| Format: | Book |
| Collection: | Institute Of Physics Conference Series |
| Categories: |
Books in English
>
Science
>
Physical
|
| EAN: | 9780750305006 |
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