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Tribology In Chemical-Mechanical Planarization eBook

by David Craven e Hong Liang
Book eBook
language: english
Publisher: CRC PRESS, March of 2005 ‧
92,74€
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The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization technology. This book offers an examination of tribological principles and their applications in CMP, including integrated circuits and basic concepts in surfaces of contacts.

Tribology In Chemical-Mechanical Planarization

by David Craven e Hong Liang

Property Description
ISBN: 9781040062197
Publisher: CRC PRESS
Release Date: March of 2005
Language: English
Format: eBook
File Format and Compatibility:
Categories: eBooks in English > Engineering > General Engineering
EAN: 9781040062197
Acessibilidade: Ver características de acessibilidade indicadas pelo editor