Capa do artigo Rapid Thermal Processing Of Semiconductors
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Rapid Thermal Processing Of Semiconductors eBook

by Peter J. Hesketh e Victor E. Borisenko
language: english
Publisher: SPRINGER US, November of 2013 ‧
264,34€
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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

Rapid Thermal Processing Of Semiconductors

by Peter J. Hesketh e Victor E. Borisenko

Property Description
ISBN: 9781489918048
Publisher: SPRINGER US
Release Date: November of 2013
Language: English
Format: eBook
Collection: Microdevices
Categories: eBooks in English > Engineering > Electricity and Energy
EAN: 9781489918048

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