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Rapid Thermal Processing Of Semiconductors eBook
language: english
Publisher:
SPRINGER US, November of 2013 ‧
see product details
264,34€
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IMMEDIATE AVAILABILITY
Ebook for ADE
SYNOPSIS
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9781489918048 |
| Publisher: | SPRINGER US |
| Release Date: | November of 2013 |
| Language: | English |
| Format: | eBook |
| File Format and Compatibility: | PDF para ADE |
| Collection: | Microdevices |
| Categories: |
eBooks in English
>
Engineering
>
Electricity and Energy
|
| EAN: | 9781489918048 |
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