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Handbook For Cleaning For Semiconductor Manufacturing eBook

Fundamentals And Applications

language: english
Publisher: WILEY, February of 2011 ‧
340,46€
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Ebook for ADE
This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

Handbook For Cleaning For Semiconductor Manufacturing

Fundamentals And Applications

Property Description
ISBN: 9781118071731
Publisher: WILEY
Release Date: February of 2011
Language: English
Format: eBook
File Format and Compatibility: PDF para ADE
Collection: Wiley-Scrivener
Categories: eBooks in English > Engineering > General Engineering
eBooks in English > Others
EAN: 9781118071731