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Wafer Fabrication
Automatic Material Handling System
language: english
Publisher:
De Gruyter, September of 2018 ‧
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SYNOPSIS
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and o
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9783110486902 |
| Publisher: | De Gruyter |
| Release Date: | September of 2018 |
| Language: | English |
| Dimensions: | 170 x 240 x 20 mm |
| Cover: | Hardcover |
| Pages: | 284 |
| Format: | Book |
| Collection: | De Gruyter Reference |
| Categories: |
Books in English
>
Engineering
>
General Engineering
|
| EAN: | 9783110486902 |
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