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Extreme Ultraviolet Lithography
language: english
Publisher:
MCGRAW-HILL EDUCATION - EUROPE, May of 2009 ‧
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SYNOPSIS
Offers the guidance to extreme ultraviolet lithography (EUVL), covering the scientific theory, processing methods, applications, and directions. Designed to help you optimize EUVL, this resource covers EUV lithography tools, EUV printer, EUV sources, multilayer EUV, EUV optics, as well as defect control, resist, and mask techniques.
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9780071549189 |
| Publisher: | MCGRAW-HILL EDUCATION - EUROPE |
| Release Date: | May of 2009 |
| Language: | English |
| Cover: | Hardcover |
| Pages: | 482 |
| Format: | Book |
| Categories: |
Books in English
>
Engineering
>
Electricity and Energy
|
| EAN: | 9780071549189 |
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