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Cmos-Mems
language: english
Publisher:
Wiley-VCH Verlag GmbH, April of 2013 ‧
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SYNOPSIS
This softcover edition of the eponymous volume from the successful "Advanced Micro & Nanosystems" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation. .
DETAILS
| Property | Description |
|---|---|
| ISBN: | 9783527334995 |
| Publisher: | Wiley-VCH Verlag GmbH |
| Release Date: | April of 2013 |
| Language: | English |
| Dimensions: | 170 x 240 x 35 mm |
| Cover: | Softcover |
| Pages: | 608 |
| Format: | Book |
| Collection: | Polymer Nano-, Micro- And Macrocomposites |
| Categories: |
Books in English
>
Engineering
>
Mechanical Engineering
|
| EAN: | 9783527334995 |
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